# | Class | status | |
---|---|---|---|
1 |
S:79031218
M:BEVEL CAM O:NanoPhotonics AG, NanoPhotonics GmbH, Rudolph Technologies Germany GmbH |
9 | Dead |
2 |
S:78102117
M:ELLIPSON O:NanoPhotonics AG, NANOPHOTONICS GMBH |
9 | Dead |